Framework-based Cluster Tool Controller for Wafer Polishing Object-oriented analysis, design and implementation support for a Java/CORBA based equipment controller with single wafer tracking capability.

Image Processing in Clean- and Biotechnology Several projects have been realized for the detection of contaminations in clean environments. Using specific methods of image analysis and image processing we were able to detect and automatically classify contaminating particles with high accuracy (more ...).

Document Management in Material Sciences In cooperation with a leading provider for material data we have developed a sophisticated document management system. The system is able to manage and distribute a wealth of material data, documents, images, tables, diagrams and micrographs via internet (more ...).

Cluster Tool Controller for Semiconductor Manufacturing Implementation of a Java/XML based machine controller application with advanced process control (APC) and built-in recipe management functionality (more ...).

Recipe Management System for Semiconductor Manufacturing Development of a facility-wide recipe management system for semiconductor manufacturing based on an advanced Java/CORBA system architecture (more ...).

Recipe Management System for Harddisk Manufacturing Integration of a facility-wide recipe management system for harddisk manufacturing based on an advanced Java/CORBA/TIBCO system architecture.

Development and Implementation of a Cluster Tool Controller for Microfabrication Facilities Adaption and further development of a Java/XML-based machine controller application for usage within microfabrication facilities. Joint project founded by German BMBF (Federal Ministry of Education and Research). Project partners are: Forschungszentrum Karlsruhe EADS Deutschland GmbH Robert Bosch GmbH LEO-Elektronenmikroskopie GmbH ASYS Automatic Systems GmbH & Co. KG Simotec GmbH Fraunhofer Institut f�r Produktionstechnik und Automatisierung IPA Project homepage: www.geraetebaukasten.de

Development of an Equipment Configurator for a Microsystem Assembly Line Design and implementation of a JAVA-based equipment and production line configurator with automatic optimization capabilities to find the best configuration with respect to product mix, throughput and cost.