Supported Industry Standards
- SEMI E5-1108 – SEMI Equipment Communication Standard (SECSII)
- SEMI E120-1104 – Common Equipment Model (CEM)
- SEMI E125-1105 – Equipment Self Description (EqSD)
- SEMI E132-1105 – Client Authentication and Authorization
- SEMI E133-1108 – Process Control System (PCS)
- SEMI E134-1105 – Data Collection Management (DCM)
- SEMI E138-0305 – Common Components
- SEMI G81-0703 – Specification for Map Data Items
- SEMI G85-0703 – Specification for Map Data Format
- KLARF – KLA Results File
- Keithley Electrical Test Data
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